Mutete firimu lithium niobate zvinhu uye nhete firimu lithium niobate modulator

Zvakanakira uye kukosha kwemutete firimu lithium niobate mune yakabatanidzwa microwave photon tekinoroji

Microwave photon tekinorojiine mabhenefiti ehukuru hwekushanda bandwidth, yakasimba parallel kugadzirisa kugona uye kushomeka kwekutapurirana kurasikirwa, iyo ine mukana wekutyora tekinoroji bhodhoro rechinyakare microwave system uye kuvandudza mashandiro echiuto emagetsi ruzivo rwemidziyo yakadai se radar, hondo yemagetsi, kutaurirana uye kuyerwa uye control.Nekudaro, iyo microwave photon system yakavakirwa pane discrete zvishandiso ine mamwe matambudziko akadai vhoriyamu yakakura, huremu hunorema uye kusagadzikana kwakashata, izvo zvinotadzisa zvakanyanya kushandiswa kweiyo microwave photon tekinoroji munzvimbo dzemuchadenga uye nemhepo.Naizvozvo, yakasanganiswa microwave photon tekinoroji iri kuita tsigiro yakakosha yekupwanya kushandiswa kwemicrowave photon mumauto emagetsi ruzivo system uye kupa kutamba kwakazara kune zvakanakira microwave photon tekinoroji.

Parizvino, SI-yakavakirwa photonic yekubatanidza tekinoroji uye INP-yakavakirwa photonic yekubatanidza tekinoroji yakawedzera kukura mushure memakore ebudiriro mumunda wekutaurirana kwemaziso, uye zvigadzirwa zvakawanda zvakaiswa mumusika.Nekudaro, pakushandiswa kweiyo microwave photon, pane mamwe matambudziko mumhando mbiri idzi dzemafoton ekubatanidza matekinoroji: semuenzaniso, iyo isiri-linear electro-optical coefficient yeSi modulator uye InP modulator inopesana neiyo yakakwirira mutsara uye hukuru hwesimba hunhu hunoteverwa nemicrowave. photon teknolojia;Semuyenzaniso, iyo silicon optical switch inoona optical path switching, ingave yakavakirwa pa thermal-optical effect, piezoelectric effect, kana carrier jekiseni dispersion effect, ine matambudziko ekunonoka kushandura kumhanya, kushandisa simba uye kupisa kupisa, izvo zvisingagone kusangana nekukurumidza. beam scanning uye yakakura array scale microwave photon application.

Lithium niobate yagara iri sarudzo yekutanga yekumhanyisaelectro-optic modulationzvinhu nekuda kweiyo yakanakisa mutsara electro-optic maitiro.Nekudaro, iyo yechinyakare lithium niobateelectro-optical modulatorinogadzirwa neyakakura lithium niobate crystal material, uye saizi yemudziyo yakakura kwazvo, isingakwanise kusangana nezvinodiwa zveyakasanganiswa microwave photon tekinoroji.Maitiro ekubatanidza lithium niobate zvinhu zvine mutsara electro-optical coefficient mune yakabatanidzwa microwave photon tekinoroji system chave chinangwa chevatsvagiri vakakodzera.Muna 2018, boka rekutsvagisa kubva kuHarvard University kuUnited States rakatanga kuzivisa iyo photonic yekubatanidza tekinoroji yakavakirwa pane yakaonda firimu lithium niobate muNature, nekuti tekinoroji ine zvakanakira kubatana kwepamusoro, hombe electro-optical modulation bandwidth, uye yakakwirira mutsara we electro. -optical effect, yakambotangwa, yakabva yakonzera kutarisisa kwedzidzo uye maindasitiri mumunda wekubatanidza photonic uye microwave photonics.Kubva pamaonero eiyo microwave photon application, bepa rino rinoongorora pesvedzero uye kukosha kweiyo photon yekubatanidza tekinoroji zvichibva pane yakaonda firimu lithium niobate pakuvandudzwa kwemicrowave photon tekinoroji.

Mutete firimu lithium niobate zvinhu uye nhete firimulithium niobate modulator
Mumakore maviri achangopfuura, rudzi rutsva rwelithium niobate material rwakabuda, kureva kuti, lithium niobate firimu rinobviswa kubva muhombe yelithium niobate crystal nenzira ye "ion slicing" uye yakasungirirwa kuSi wafer ine silica buffer layer fomu LNOI (LiNbO3-On-Insulator) zvinhu [5], iyo inonzi yakaonda firimu lithium niobate zvinhu mubepa rino.Ridge waveguides ine hurefu hunodarika zana nanometers inogona kuisirwa pane yakaonda firimu lithium niobate zvinhu neyakaomeswa yakaoma etching process, uye inoshanda refractive index musiyano weiyo waveguides yakaumbwa inogona kusvika kupfuura 0.8 (kureba kupfuura refractive index musiyano wechinyakare. lithium niobate waveguides ye 0.02), sezvinoratidzwa muMufananidzo 1. Iyo yakasimba inorambidzwa waveguide inoita kuti zvive nyore kuenzanisa munda wechiedza ne microwave field paunenge uchigadzira modulator.Nekudaro, zvinobatsira kuwana yakaderera hafu-wave voltage uye yakakura modulation bandwidth mune ipfupi kureba.

Kutaridzika kwekurasikirwa kwakaderera lithium niobate submicron waveguide inotyora bhodhoro repamusoro kutyaira voltage yetsika lithium niobate electro-optic modulator.Electrode spacing inogona kuderedzwa kusvika ~ 5 μm, uye kupindirana pakati pemunda wemagetsi uye optical mode field inowedzera zvakanyanya, uye vπ · L inoderera kubva kupfuura 20 V · cm kusvika pasi pe2.8 V · cm.Naizvozvo, pasi peiyo hafu-wave voltage, kureba kwechishandiso kunogona kuderedzwa zvakanyanya kana zvichienzaniswa neyechinyakare modulator.Panguva imwecheteyo, mushure mekugadzirisa maparamendi ehupamhi, ukobvu uye kupindirana kweyekufamba wave electrode, sezvakaratidzwa mumufananidzo, modulator inogona kuve nekugona kweyekupedzisira-yepamusoro modulation bandwidth yakakura kupfuura 100 GHz.

Fig.1 (a) yakaverengerwa nzira yekugovera uye (b) mufananidzo wemuchinjiko-chikamu cheLN waveguide

Fig.2 (a) Waveguide uye electrode chimiro uye (b) coreplate yeLN modulator

Kuenzanisa kwemutete firimu lithium niobate modulators neyakajairwa lithium niobate yekutengesa modulators, silicon-based modulators uye indium phosphide (InP) modulators uye mamwe aripo akakwira-kumhanya electro-optical modulators, iwo makuru maparamita ekuenzanisa anosanganisira:
(1) Half-wave volt-length product (vπ ·L, V·cm), kuyera kukwenenzverwa kwemodulator, kudiki kukosha, kukwirisa kwekuita modulation;
(2) 3 dB modulation bandwidth (GHz), iyo inoyera mhinduro yemodulator kune yakakwirira-frequency modulation;
(3) Optical yekuisa kurasikirwa (dB) munharaunda yemodulation.Inogona kuonekwa kubva patafura kuti firimu yakaonda lithium niobate modulator ine mabhenefiti ari pachena mumodulation bandwidth, hafu-wave voltage, optical interpolation kurasikirwa uye zvichingodaro.

Silicon, sedombo rekona reiyo yakasanganiswa optoelectronics, yakagadziridzwa kusvika parizvino, iyo nzira yakakura, miniaturization yayo inoenderana neyakakura-kubatanidzwa kweanoshanda / passive zvishandiso, uye modulator yayo yakadzidzwa zvakanyanya uye zvakadzama mumunda we optical. kutaurirana.Iyo electro-optical modulation mechanism yesilicon inonyanya kutakurisa-tion, jekiseni rekutakura uye kuunganidzwa kwemutakuri.Pakati pavo, bandwidth yemodulator ndiyo yakakwana neine linear degree carrier depletion mechanism, asi nekuda kwekuti kugovera kwemunda wemaziso kunopindirana nekusafanana kwenharaunda yekuderera, izvi zvinounza kusakanganiswa kwechipiri-kukanganisa uye yechitatu-order intermodulation kukanganisa. mazwi, akabatanidzwa nekubata kwemutakuri pachiedza, izvo zvinozotungamira mukuderedzwa kweiyo optical modulation amplitude uye chiratidzo chinokanganisa.

Iyo InP modulator ine yakasarudzika electro-optical mhedzisiro, uye iyo yakawanda-layer quantum tsime dhizaini inogona kuona yakanyanya-yakakwira mwero uye yakaderera yekutyaira voltage modulators neVπ · L kusvika 0.156V · mm.Zvisinei, kusiyanisa kwe refractive index nemagetsi emagetsi kunosanganisira mazwi akaenzana uye asingasviki, uye kuwedzera kwesimba remagetsi kuchaita kuti chiitiko chechipiri chive chakakurumbira.Naizvozvo, silicon neInP electro-optic modulators inoda kuisa bias kuti igadzire pn junction kana ichishanda, uye pn junction ichaunza kurasikirwa kwekunyura kuchiedza.Nekudaro, saizi yemodulator yeava maviri idiki, iyo yekutengesa InP modulator saizi ndeye 1/4 yeLN modulator.Yakakwira modulation kunyatsoita, yakakodzera kune yakakwira density uye ipfupi dhijitari optical transmission network senge data centers.Iyo electro-optical mhedzisiro ye lithium niobate haina mwenje yekunyudza nzira uye yakaderera kurasikirwa, iyo inokodzera kureba kwakabatana.kutaurirana kwemazisonehukuru hukuru uye chiyero chepamusoro.Mune microwave photon application, iyo electro-optical coefficients yeSi uye InP haina mutsara, iyo isina kukodzera iyo microwave photon system inoteedzera mutsara wepamusoro uye masimba makuru.Iyo lithium niobate zvinhu yakanyatsokodzera microwave photon application nekuda kwayo yakazara mutsara electro-optic modulation coefficient.