Silicon photonics inoshanda chinhu
Photonics active components inoreva zvakanangana nekuita nemaune kudyidzana pakati pechiedza nenyaya. Iyo yakajairika inoshanda chikamu chephotonics ndeye optical modulator. Zvese zvazvino silicon-basedOptical modulatorszvakavakirwa paplasma yemahara inotakura mhedzisiro. Kuchinja huwandu hwemahara maerekitironi nemaburi musilicon zvinhu nedoping, magetsi kana nzira dzemaziso zvinogona kushandura iyo yakaoma refractive index, maitiro anoratidzwa muequations (1,2) anowanikwa nekukodzera data kubva kuSoref naBennett pakureba kwe1550 nanometers. . Kuenzaniswa nemaerekitironi, maburi anokonzera chikamu chikuru chechokwadi uye chekufungidzira refractive index shanduko, ndiko kuti, anogona kuburitsa shanduko yakakura yechikamu chekurasikirwa kwakapihwa shanduko, saka muMach-Zehnder modulatorsuye ring modulators, inowanzofarirwa kushandisa maburi kugadziraphase modulators.
Izvo zvakasiyana-siyanasilicon (Si) modulatormhando dzinoratidzwa muMufananidzo 10A. Mune inotakura jekiseni modulator, mwenje unowanikwa mune intrinsic silicon mukati mehupamhi hwepini jekiseni, uye maerekitironi nemaburi zvinobaiwa. Nekudaro, ma modulator akadaro anononoka, kazhinji ane bandwidth ye500 MHz, nekuti maerekitironi emahara nemakomba zvinotora nguva yakareba kuti zvibatane mushure mejekiseni. Naizvozvo, chimiro ichi chinowanzo shandiswa seanosiyana optical attenuator (VOA) kwete modulator. Mune inotakura depletion modulator, chikamu chechiedza chinowanikwa mune yakamanikana pn junction, uye kuderera kwehupamhi hweiyo pn junction inoshandurwa neyakaiswa magetsi emagetsi. Iyi modulator inogona kushanda nekumhanya inopfuura 50Gb/s, asi ine yakakwira yekumashure yekuisa kurasikirwa. Iyo yakajairika vpil ndeye 2 V-cm. Metal oxide semiconductor (MOS) (chaizvoizvo semiconductor-oxide-semiconductor) modulator ine yakatetepa oxide layer mune pn junction. Iyo inobvumira kumwe kuunganidzwa kwemutakuri pamwe nekuderera kwemutakuri, zvichibvumira diki VπL yeinenge 0.2 V-cm, asi ine iyo yakashata yekurasikirwa kwepamusoro kwemaziso uye yakakwirira capacitance pakureba kweyuniti. Uye zvakare, kune SiGe yemagetsi absorption modulators yakavakirwa paSiGe (silicon Germanium alloy) bhendi kumucheto kufamba. Pamusoro pezvo, kune magraphene modulators anovimba negraphene kuchinja pakati pemasimbi anonwisa uye ma insulators akajeka. Izvi zvinoratidza kusiyana-siyana kwekushandiswa kwemaitiro akasiyana-siyana ekuwana yakakwirira-speed, yakaderera-kurasikirwa optical signal modulation.
Mufananidzo 10: (A) Muchinjikwa-chikamu dhayagiramu yeakasiyana silicon-based optical modulator magadzirirwo uye (B) muchinjika-chikamu dhizaini ye optical detector magadzirirwo.
Mazhinji masilicon-based light detectors anoratidzwa muMufananidzo 10B. Iyo inonwisa zvinhu ndeye germanium (Ge). Ge inokwanisa kutora mwenje pamasaisai ekudzika kusvika pa1.6 microns. Inoratidzwa kuruboshwe ndiyo yakanyanya kubudirira mune zvekutengesa pini chimiro nhasi. Inoumbwa neP-type doped silicon iyo Ge inokura. Ge naSi vane 4% lattice mismatch, uye kuti kuderedze kubviswa, chidimbu cheSiGe chinotanga kukura sebuffer layer. N-mhando doping inoitwa pamusoro peGe layer. A metal-semiconductor-metal (MSM) photodiode inoratidzwa pakati, uye APD (Avalanche Photodetector) inoratidzwa kurudyi. Iyo avalanche dunhu muAPD iri muSi, iyo ine yakaderera ruzha hunhu kana ichienzaniswa neiyo avalanche dunhu muBoka III-V elemental zvinhu.
Parizvino, hapana mhinduro dzine mabhenefiti ari pachena mukubatanidza kuwana kwekuona nesilicon photonics. Mufananidzo 11 unoratidza akati wandei sarudzo dzakarongwa nedanho regungano. Kuruboshwe kuruboshwe kune monolithic kubatanidzwa kunosanganisira kushandiswa kwe epitaxially yakakura germanium (Ge) sechinhu chinoyevedza kuwana, erbium-doped (Er) glass waveguides (seAl2O3, inoda kupomba kwemaziso), uye epitaxially yakakura gallium arsenide (GaAs). ) quantum dots. Iyo inotevera column ndeye wafer kune wafer musangano, inosanganisira oxide uye organic bonding mu III-V boka rekuwana dunhu. Iyo inotevera koramu ndeye chip-to-wafer kusangana, iyo inosanganisira kunyudza iyo III-V boka chip mugomba resilicon wafer uye wozogadzira waveguide chimiro. Kubatsira kweiyi yekutanga makoramu nzira ndeyekuti mudziyo unogona kunyatsoshanda wakaedzwa mukati mewafesi usati wacheka. Iyo yekurudyi-yakanyanya mbiru ndeye chip-to-chip musangano, kusanganisira yakananga kubatanidzwa kwesilicon machipisi kune III-V boka machipisi, pamwe nekubatanidza kuburikidza nelens uye grating couplers. Maitiro ekuenda kune zvekutengesa maapplication ari kufamba kubva kurudyi kuenda kuruboshwe rwechati kune mamwe akabatanidzwa uye akabatanidzwa mhinduro.
Mufananidzo 11: Maitiro ekuona kuwana anobatanidzwa sei musilicon-based photonics. Sezvo iwe uchifamba kubva kuruboshwe kuenda kurudyi, nzvimbo yekugadzira yekugadzira zvishoma nezvishoma inodzokera kumashure mukuita.
Nguva yekutumira: Jul-22-2024